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Resolution limits in electron beam lithography

Rishton, Stephen Anthony (1984) Resolution limits in electron beam lithography. PhD thesis, University of Glasgow.

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Abstract

Summary available: p. [10]

Item Type: Thesis (PhD)
Qualification Level: Doctoral
Subjects: T Technology > T Technology (General)
Colleges/Schools: College of Science and Engineering > School of Engineering
Supervisor's Name: Wilkinson, Prof. C.D.W.
Date of Award: 1984
Depositing User: Elaine Ballantyne
Unique ID: glathesis:1984-2864
Copyright: Copyright of this thesis is held by the author.
Date Deposited: 19 Sep 2011
Last Modified: 10 Dec 2012 14:01
URI: http://theses.gla.ac.uk/id/eprint/2864

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