Etching and chemomechanical polishing of compound semiconductors using halogen-based reagents

Nicol, Irene (1996) Etching and chemomechanical polishing of compound semiconductors using halogen-based reagents. PhD thesis, University of Glasgow.

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Abstract

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ce of sodium hypochlorite is explained in terms of its composition. At low pH (<
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Item Type: Thesis (PhD)
Qualification Level: Doctoral
Subjects: Q Science > QD Chemistry
Colleges/Schools: College of Science and Engineering > School of Chemistry
Supervisor's Name: Winfield, Prof. John M.
Date of Award: 1996
Depositing User: Elaine Ballantyne
Unique ID: glathesis:1996-1631
Copyright: Copyright of this thesis is held by the author.
Date Deposited: 05 Mar 2010
Last Modified: 10 Dec 2012 13:44
URI: http://theses.gla.ac.uk/id/eprint/1631

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