Component development for an SOI integrated displacement sensor

Ghisetti, Emanuele Alberto (2020) Component development for an SOI integrated displacement sensor. PhD thesis, University of Glasgow.

Due to Embargo and/or Third Party Copyright restrictions, this thesis is not available in this service.


Abstract not currently available.

Item Type: Thesis (PhD)
Qualification Level: Doctoral
Keywords: Germanium, photodetector, silicon, photonics, SOI, nanofabrication, E-beam, lithography, fabrication, waveguide, interferometer, gravimeter, MEMS.
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Colleges/Schools: College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Supervisor's Name: Paul, Prof. Douglas
Date of Award: 2020
Embargo Date: 31 October 2023
Depositing User: Mr Emanuele Alberto Ghisetti
Unique ID: glathesis:2020-81745
Copyright: Copyright of this thesis is held by the author.
Date Deposited: 21 Oct 2020 14:31
Last Modified: 16 Jun 2021 15:43

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