Rishton, Stephen Anthony (1984) Resolution limits in electron beam lithography. PhD thesis, University of Glasgow.
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Printed Thesis Information: https://eleanor.lib.gla.ac.uk/record=b1632730
Abstract
Summary available: p. [10]
| Item Type: | Thesis (PhD) |
|---|---|
| Qualification Level: | Doctoral |
| Subjects: | T Technology > T Technology (General) |
| Colleges/Schools: | College of Science and Engineering > School of Engineering |
| Supervisor's Name: | Wilkinson, Prof. C.D.W. |
| Date of Award: | 1984 |
| Depositing User: | Elaine Ballantyne |
| Unique ID: | glathesis:1984-2864 |
| Copyright: | Copyright of this thesis is held by the author. |
| Date Deposited: | 19 Sep 2011 |
| Last Modified: | 10 Dec 2012 14:01 |
| URI: | https://theses.gla.ac.uk/id/eprint/2864 |
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