Glasgow Theses Service

Techniques and applications of very high resolution electron-beam lithography

Mackie, William Stuart (1984) Techniques and applications of very high resolution electron-beam lithography. PhD thesis, University of Glasgow.

Full text available as:
[img]
Preview
PDF
Download (26Mb) | Preview

Abstract

Summary available: p. 1-2.

Item Type: Thesis (PhD)
Qualification Level: Doctoral
Subjects: T Technology > T Technology (General)
Colleges/Schools: College of Science and Engineering
Supervisor's Name: Supervisor, not known
Date of Award: 1984
Depositing User: Mrs Marie Cairney
Unique ID: glathesis:1984-2833
Copyright: Copyright of this thesis is held by the author.
Date Deposited: 08 Sep 2011
Last Modified: 05 Feb 2014 16:10
URI: http://theses.gla.ac.uk/id/eprint/2833

Actions (login required)

View Item View Item