Techniques and applications of very high resolution electron-beam lithography

Mackie, William Stuart (1984) Techniques and applications of very high resolution electron-beam lithography. PhD thesis, University of Glasgow.

Abstract

Summary available: p. 1-2.

• Item Type: Thesis (PhD)
• Qualification Level: Doctoral
• Subjects: T Technology > T Technology (General)
• Colleges/Schools: College of Science and Engineering
• Supervisor's Name: Supervisor, not known
• Date of Award: 1984
• Depositing User: Mrs Marie Cairney
• Unique ID: glathesis:1984-2833
• Copyright: Copyright of this thesis is held by the author.
• Date Deposited: 08 Sep 2011
• Last Modified: 05 Feb 2014 16:10
• URI: https://theses.gla.ac.uk/id/eprint/2833